Analyse chimique
Veille normative juin 2019

ISO 11952,  Analyse chimique des surfaces – Microscopie à sonde à balayage – Détermination des quantités géométriques en utilisant des microscopes à sonde à balayage : Étalonnage des systèmes de mesure

Remplace ISO 11952 ( de mai 2014).

Surface chemical analysis – Scanning probe microscopy – Determination of geometric quantities using SPM: Calibration of measuring systems

This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required. This document has the following objectives:

• to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length;

• to define the minimum requirements for the calibration process and the conditions of acceptance;

• to ascertain the instrument’s ability to be calibrated (assignment of a “calibrate-ability” category to the instrument);

• to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability);

• to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM;

• to define the requirements for reporting results.

Publié par ISO le 01/05/2019