3. ALD technology for microbattery encapsulation
3.1 Lithium microbattery technology
A microbattery is defined as a rechargeable all-solid-state electrochemical generator. Its operating principle is based on the insertion and de-insertion (or intercalation-de-intercalation) of an alkali metal ion or proton into the positive electrode. The main systems use Li+ ionic species...
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ALD technology for microbattery encapsulation
MLD technology
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