3. Planar waveguides – Integrated optics
There is a growing interest in micro-opto-electromechanical systems (MOEMS), with the development of various microdevices in the disciplinary fields of telecommunications and, particularly in recent years, sensors. The aim of micro- and nanophotonics is to integrate photonic or optoelectronic devices on microelectronic chips.
Since the mid-1980s, most work in microphotonics has focused on monolithic integration of photonic elements on silicon, guaranteeing perfect compatibility with CMOS (Complementary Metal Oxide Semiconductor) electronics
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Planar waveguides – Integrated optics