Application technologies
Microbatteries -Microsources of energy in thin layers

Add to my library

D3342 V2 Article

Application technologies
Microbatteries -Microsources of energy in thin layers

Authors : Alain LEVASSEUR, Brigitte PECQUENARD, Philippe VINATIER, Raphaël SALOT, Frédéric LE CRAS, Michel MARTIN

Review date: September 15, 2020 | Lire en français

Add to my library Add to my library

Logo Techniques de l'Ingenieur You do not have access to this resource.
Request your free trial access! Free trial

Already subscribed?

4. Application technologies

Readers are referred to the specialized files in our collection.

4.1 Manufactured by PVD

The abbreviation PVD (Physical Vapor Deposition) refers to a family of physical thin-film deposition techniques. It includes techniques based on ion sputtering and those employing thermal evaporation. Almost all PVD techniques are used to produce microbatteries. The sequence for producing a PVD microbattery in the laboratory is typically as follows:

  • preparation of the appropriate substrate (cleaning outside the deposition machine, cleaning in situ, heating);

  • placing the "electrical collectors" mask in a glove box under argon ;

  • ...

You do not have access to this resource.
Logo Techniques de l'Ingenieur

Exclusive to subscribers. 97% yet to be discovered!

You do not have access to this resource. Click here to request your free trial access!

Already subscribed?


Article included in this offer

"Green chemistry"

( 167 articles )

Complete knowledge base

Updated and enriched with articles validated by our scientific committees

Services

A set of exclusive tools to complement the resources

View offer details
Contact us