1. Background
Dr. Mathias Heckele
Physicist,
Head of the Replication Department
Institute for Microstructure Technology (IMT) at the Karlsruhe Research Center (FZK)
[email protected]
Bertrand FILLON
Ph.D. in Physical Chemistry of Polymers
Program Manager at LITEN (Laboratory for Innovation in New Energy and Nanomaterials)
CEA/DRT/LITEN Grenoble
[email protected]
In recent years, replication techniques (microinjection and hot-stamping) used to fabricate microsystems have steadily made significant progress. Indeed, the resolution of microstructures and details has reached values below the micrometer range and even into the nanometer range. Designers and users consider the micrometer scale to be reliably...
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Background