1. Introduction
Chaouqi MISBAH
CNRS Research Director
[email protected]
Microelectronics is in a perpetual quest for miniaturization, with the aim of improving device performance while reducing manufacturing costs. This approach comes up against physical and technological limits when it comes to going below a dimension of a few tenths of a micrometer. Since the 1970s, the race towards miniaturization has been driven by two complementary approaches:
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Introduction