9. Glossary – definitions
CVD/DCPV; Chemical Vapor Deposition.
A process for producing solids by gas-solid reaction using a precursor gas and a solid substrate at a sufficiently high temperature. The many variants of CVD include :
PECVD: Plasma-Enhanced CVD; the gas phase is replaced by a plasma phase, which greatly reduces the working temperature;
LCVD: Laser-CVD; the energy input is localized by the laser, making it possible to localize deposits for rapid prototyping (3D printing), for example;
FBCVD: Fluidized-Bed CVD: the substrate is a powder, stirred by circulating gas to prevent agglomeration;
CVI: Chemical Vapor Infiltration; the substrate is porous, and deposition takes place at depth in this pore space;
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Glossary – definitions