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Depositing nanometric films by radio frequency cathodic sputtering

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Depositing nanometric films by radio frequency cathodic sputtering

Author : Gilles RENOU

Publication date: April 10, 2006 | Lire en français

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References BLAISE (G.) Aspects cinématiques de l'interaction ion-surface. LIMOGE (Y.) Le vide, les couches minces. Suppl. n° 224, SFV (1984). SIGMUND (P.) Theory of spottering. Physical Review vol. 181, n° 2 (1969). Others SERWAY (R.) Physics for Scientists and Engineers. Third edition, Saunders College Publishing. RAIZER (Yu.P.) Gas Discharge Physics. Springer. Interactions plasmas froids matériaux. Journée d'études « Oléron 87 », Les éditions de la physique. MAHAN (J.E.) Physical vapor deposition of thin films. Wiley Interscience Publication....
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