1. Merit functions useful for describing binary optics
1.1 Working assumptions
For the remainder of this document, it is assumed that scalar diffraction theory applies to describe the light diffracted by binary optics. It is therefore assumed that the components are illuminated in unpolarized light and do not introduce polarizing effects on the light that would be due to patterns of comparable size to the wavelength and/or with etch depths inducing possible guiding effects.
1.2 Description of binary optics
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Merit functions useful for describing binary optics
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