Transductions used in MEMS
Micro-electromechanical system sensors (MEMS) - Operating Principles

Here, we classify MEMS sensors according to the type of physical principle used to convert the type of quantity to be measured into the electrical quantity that will enable it to be used (e.g. capacitive, piezoelectric, piezoresistive, etc.). First of all, it should be remembered that these mechanisms are based on the deformation of silicon structures or other materials. The following paragraph deals with the relationship between forces and deformations in a material.