Glossary
The Chemistry of ALD Precursors

Coordination sphere; coordination sphere

A central atom or ion surrounded by its ligands, molecules or anions.

Volatility

A measure of a substance's ability to vaporize.

Encombrement stérique; steric hindrance

Discomfort caused by the arrangement and volume of part of a molecule.

Oligomerization

The process of transforming a monomer, or a mixture of monomers, into an oligomer.

Moment dipolaire; dipolar moment

Quantity reflecting the polarity of a molecule. A molecule has a dipole moment when there is a heterogeneous distribution of electric charges.

Electronegativity

Quantity that characterizes an atom's ability to attract...