5. Glossary
Atomic diffusion bonding (ADB)
A promising process for bonding wafers at room temperature: thin films are sputtered onto two flat wafer surfaces, then the two films are bonded to the wafers in a vacuum. In addition to thin metal films, thin oxide and nitride films are useful for bonding.
Énergie d'adhésion ; Adhesion energy
Energy used to bring surfaces together.
Adherence energy; Énergie d'adhérence
Energy required to separate joined surfaces (also known as bonding energy).
DCB test; Double Cantilever Beam test
Test consisting in propagating a crack by pulling on both arms of a double beam to measure Mode I toughness.
Fizeau interferometer; Fizeau interferometer
Precision optical tool invented in 1862 by Hippolyte Fizeau, still widely used for checking surfaces during manufacturing. It consists in observing the interference pattern produced...
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