1. Principle
The first PLD thin-film deposition experiments took place shortly after the discovery of the laser. H.M. Smith and A.F. Turner deposited the first thin film in 1965.
, but it wasn't until 1987 that PLD took off with the first thin-film deposits of YBa
2
Cu
3
O
7
high-temperature superconductors...
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Principle
Bibliography
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(1) - SMITH (H.M.), TURNER (A.F.) -
Vacuum Deposited Thin Films Using a Ruby Laser.
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Appl. Optics 4, p. 147 (1965).
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(2) - EASON (R.) -
Pulsed laser deposition of thin films applications-led growth of functional materials....
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