5. Comparisons and conclusions
High-energy-density beams deliver very high power densities over very short times and on well-localized areas, without giving rise to significant distortion of the parts thus treated.
The properties of treated surfaces are often impossible to achieve using conventional techniques.
The short emission wavelengths of excimer lasers, compared with those of IR lasers, enable better beam focusing. The minimum diameter of the beam's focal spot is of the order of a micrometer, i.e. an order of magnitude smaller than that of other lasers. This leads to a more localized treatment than that obtained with other types of lasers. By using a highly defocused beam, we can also achieve very good juxtaposition...
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Comparisons and conclusions