Quantitative analysis and correction calculations
Electron probe X-ray microanalysis - Applications and developments

In electron probe X-ray microanalysis, quantification is made possible by a thorough understanding of the physical processes involved in electron scattering in the target, ionization and photoelectric absorption of the X-ray radiation generated [2][4][6]. It should be remembered that in electron X-ray microanalysis, the quantity measured is the mass titre, i.e. the ratio of the mass of the element analyzed to the total mass in the analysis volume, and not, as is often mistakenly written, the mass concentration.