Glossary
Scanning electron microscopy - Principles and equipment

Cathodoluminescence; Cathodoluminescence

Spectral or imaging analysis of non-conductive samples, such as semiconductors or insulators, often rocks, emitting in the visible range (from IR to UV). A specific detector must be installed in the SEM chamber.

Détecteur BSE ; BSE detector

Detector placed under the objective lens and above the sample. It can be used to highlight chemical, crystallographic or magnetic contrasts.

EBSD detector; Détecteur EBSD

A camera that captures diffraction patterns from the sample as it scans an area. Their point-by-point analysis provides an image of the crystallographic orientation of the sample's grains.

Détecteur EDS ; EDS detector

Recovers the photons emitted during electron-matter interaction, enabling the chemical species present in the sample to be determined and quantified point by point (spectrum) or imaged.