Measurement principles and equipment. Experimental parameters
Secondary ion emission SIMS — Principles and equipment

Secondary emission analysis of solid materials is based on the bombardment of samples by a primary ion beam, which is focused into a probe on the sample surface. The primary beam undergoes a periodic double deflection, which ensures that the probe scans the surface in two perpendicular directions ( x-y). The main purpose of this scanning is to obtain, in dynamic regime, a homogeneous erosion of the surface, which therefore "recedes" parallel to itself during measurement. The primary scan defines the swept or irradiated area (e.g. 100 x 100 µm ² to 500 x 500 µm ² ), which, together with the disturbed depth described above, limits the volume disturbed by the primary beam (i.e. 10 ² to 5 · 10 ³ µm ^...