X-ray fluorescence quantification
Reference-free XRR-GIXRF combined analysis for thin layers

X-ray fluorescence or emission spectrometry is already described in the article [P 2 695] , and the reader is referred to it for more details on the principles of absorption and emission, and the operation of energy-dispersive or wavelength-dispersive spectrometers.

X-ray fluorescence emitted by a sample under excitation can be used for elemental quantification (in number of atoms per area or mass per area). While the most common means of quantification is the use of standards to qualify the device, there is growing...