Study of different commercial laser interferometer systems for dimensional measurement and associated performances
Dimensional measurements by laser interferometry

One of the two most common techniques used in commercial laser interferometric dimensional measurement systems is based on the use of a stabilized laser source (He-Ne laser or DFB laser diode) operating at a single wavelength.

This technique is used, in particular, for displacement control on machine tools using a single-frequency He-Ne laser source. It is offered by a number of manufacturers, including Renishaw, SIOS, Chotest, API (Automated Precision Inc.) and MotionX Corp (see list of manufacturers for associated web links in the For further information section).

The basic setup, shown in figure