3. Conclusions, latest trends and challenges
3.1 Submicron-scale metrology
SThM has already demonstrated temperature measurements on very small systems.
At the micrometer scale, SThM calibration is in fact a transposition of that used for contact temperature measurement at higher scales. To minimize measurement error, a calibration sample is required whose surface properties correspond as closely as possible to those of the sample to be characterized. The measurement must be carried...
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Conclusions, latest trends and challenges
Acronyms, notations and symbols
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