10. Fluid characteristics for diffusion pumps
Driving fluids for diffusion pumps include esters, mineral oils and silicone oils. The characteristics of some fluids are given in table
8
.
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Fluid characteristics for diffusion pumps
References
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(1) - ROTH (A.) -
Vacuum technology.
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1
er
éd. Amsterdam, North-Holland Publishing Company (1976).
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(2) - DUSHMAN (S.), LAFFERTY (J.M.) -
Scientific foundations of vacuum technique.
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806 p., 2e...
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