Very low-pressure gas : Correspondence between vacuum measurement units

Correspondence between vacuum measurement units
Very low-pressure gas

Author : Guy ROMMEL

Publication date: August 10, 1985 | Lire en français

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1. Correspondence between vacuum measurement units

Figure 1 shows the corresponding units used for pressure, desorption rate and gas flow measurements.

Table 1 shows the various units of gas flow.

Let's take a 1 m² surface area with a desorption rate of 10^–10 Torr · L / s · cm² pumped by a pump with a volume flow rate q _v of 1,000 L / s.

The gas flow is :

q_G = q_GU S = 10^–10 × 10⁴ = 10^–6 Torr · L / s

q_G = (1,330 × 10^–10 ) × 1 = 1.3 × 10^–7 Pa · m³ / s

The resulting pressure is...

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Correspondence between vacuum measurement units

(1) - ROTH (A.) - Vacuum technology. - 1^er éd. Amsterdam, North-Holland Publishing Company (1976).
(2) - DUSHMAN (S.), LAFFERTY (J.M.) - Scientific foundations of vacuum technique. - 806 p., 2e éd. New York, Wiley and Sons (1962).
(3)...

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