4. Examples of non-vibrating accelerometers
Note: numerical values relating to the accuracy of accelerometric sensors should be considered as orders of magnitude, as their actual performance depends on operating conditions.
The sensor consists of a micromachined silicon pendulum positioned in a sealed enclosure between two electrodes. The force that sets the pendulum to zero is generated by an electric field emitted by the electrodes.
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mm
3
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Examples of non-vibrating accelerometers