Overview
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Read the articleAUTHORS
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Frank BERNOUX : Doctor in Optoelectronics
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Jean-Philippe PIEL : Doctor of Solid State Physics
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Bernard CASTELLON : INPG engineer
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Christophe DEFRANOUX : Head of SOPRA's Optical Characterization Laboratory
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Jean-Hervé LECAT : ESO engineer
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Pierre BOHER : ECP engineer, PhD in Solid State Physics,
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Jean-Louis STEHLÉ : Technical Manager SOPRA
INTRODUCTION
After studying the article the principles of ellipsometry and signal acquisition and processing techniques, in this section we describe in more detail the instrumentation, in the case of a rotating polarizer ellipsometer, and present some recent developments and extensions of this technique as described in the first article. We then give a brief overview of ellipsometry's fields of application, and conclude with a comparison with other surface analysis techniques.
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Ellipsometry - Instrumentation and applications
Instrumentation
References
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