2. Downscaling effect
Consider a mechanical structure (see figure
2
) consisting of two superimposed conductive electrodes, spaced at a distance d, of length L, width
and thickness h.
The upper ground electrode M is biased by a spring of stiffness k. This electrode can move in three dimensions.
We apply a force of modulus F
S
perpendicular to the upper electrode, and measure the change in capacitance between the two electrodes induced by the displacement of the mass M.
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Downscaling effect