General
Thin-film circuits - Traditional thin films

In microelectronics, there are two major trends: monolithic and heterolithic. These two trends are essentially distinguished by the nature and properties of their substrates.

A monolithic integrated circuit is characterized by a semiconductor substrate, which participates in the "active" function by virtue of its intrinsic properties. This does not exclude the possibility of adding elements to the substrate, in particular a network of thin-film interconnections.

A heterolithic (or hybrid) integrated circuit is characterized by an insulating substrate, or one that has been rendered...