2. Microlens sizing
The microlenses were modeled to optimize their geometric parameters using Zemax" software (see in [Doc. RE 138]), taking into account the Gaussian character of the laser beam. Before the microlens can be fabricated on the component, large pedestals (≍ 100 μm) need to be defined and produced using a thick transparent resin (in our case, SU-8, see
3.2
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Microlens sizing
Bibliography
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(1) - SODA (H.), IGA (K.), KITAHARA (C.), SUEMATSU (Y.) -
GaInAsP/InP surface emitting laser injection lasers.
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Jpn. J. Appl. Phys., 18, p. 2329-2330 (1979).
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(2) - IGA (K.) -
Vertical-Cavity Surface emitting Laser : its conception and evolution.
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