3. Results and discussion
3.1 Partial chlorination
A cross-section of the porous SiO2 (bottom)/TiC (middle)/CDC (top) structure obtained after partial chlorination of the TiC film is proposed figure. 1b. The CDC film thickness is estimated at 5 μm, leaving an underlayer of the conductive TiC precursor of 1.3 μm. This partial chlorination allows conversion of TiC to CDC without any delamination or cracking, both at the TiC/CDC interface and at the SiO2/TiC interface. In addition, the...
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Results and discussion
Conclusion
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