Sensors and actuators
Microsystems - Sensors, actuators and applications

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Sensors and actuators
Microsystems - Sensors, actuators and applications

Author : Gaëlle LISSORGUES

Publication date: December 10, 2025 | Lire en français

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2. Sensors and actuators

2.1 Physical principles governing microsystems

MEMS-type microsystems can be classified according to their physical transduction principle, i.e., according to the phenomena that enable a measured quantity to be converted into an electrical quantity that can be used by an associated integrated electronic system [R 430]

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