6. Glossary
fluence (or energy fluence)
Energy delivered by the laser per unit area on the target surface. It is generally expressed in J/cm
2
, and often estimated using a joulemeter and thermal paper.
excimer laser
A type of ultraviolet laser commonly used in PLD. It is based on an excimer, a dimer that is stable only in the excited state and dissociates in the ground state. The excimer lasers most commonly used in PLD are KrF* at 248 nm and ArF* at 193 nm.
laser-MBE; laser-molecular beam epitaxy
PLD technique generally coupled with an RHEED and operating in ultra-high vacuum, enabling layer-by-layer deposition as with MBE.
RHEED ; reflection high energy electron diffraction
In-situ...
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