First-Principles Simulations
Understanding ALD Through Modeling

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RE259 V2 Article

First-Principles Simulations
Understanding ALD Through Modeling

Authors : Alain ESTÈVE, Brigitte CAUSSAT

Publication date: September 10, 2026 | Lire en français

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3. First-Principles Simulations

With its conceptual simplicity—linked to a reaction chemistry that is, in principle, limited to a few key steps of molecule-surface interaction—ALD provides a particularly favorable environment for identifying and quantifying reaction mechanisms through first-principles calculations, that is, through the approximate solution of the Schrödinger equation

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