3. First-Principles Simulations
With its conceptual simplicity—linked to a reaction chemistry that is, in principle, limited to a few key steps of molecule-surface interaction—ALD provides a particularly favorable environment for identifying and quantifying reaction mechanisms through first-principles calculations, that is, through the approximate solution of the Schrödinger equation
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First-Principles Simulations
Bibliography
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(1) - SHAHMOHAMMADI (M.), OYINBO (S.T.), JEN (T.-C.) -
Recent Advances in Theoretical Development of Thermal Atomic Layer Deposition : a Review.
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Nanomaterials, 12, 831 (2022).
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(2) - SIBANDA (D.), OYINBO (S.T.), JEN (T.-C.) -...
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