3. Determining an etching system with filter
The determination principle is identical to that of a conventional system without filter. It is based on the same cross-section calculation method, using the same fundamental formula.
As with a conventional system, appropriate software can be used
[80]
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For this reason, this chapter will only deal in detail with the specific points of the calculation method and the practical recommendations specific to filtration.
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Determining an etching system with filter