Sputtering in a reactive atmosphere
Magnetron sputtering

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M1654 V1 Article

Sputtering in a reactive atmosphere
Magnetron sputtering

Authors : Alain BILLARD, Frédéric PERRY

Review date: May 12, 2026 | Lire en français

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2. Sputtering in a reactive atmosphere

.Schematic representation of the different types of cracks obtained during a Vickers indentation test of a coating under high load.
Figure 15  -  Schematic representation of the different...
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