4. Local order control tool
The applications described in this section illustrate a little-known aspect of the potential of ion irradiation, namely the structural ordering of partially disordered systems.
For the right conditions of deposited energy density (type of ions, flux, energy), the ion beam brings energy to the system to activate its transformation.
4.1 IBIEC crystallization (Ion Beam Induced Epitaxial Crystallization)
This growth method involves irradiating an amorphous/crystal interface with an ion beam to activate solid-phase epitaxy. During irradiation, the energy of the ions is chosen so that their path is much greater than the thickness of the amorphous layer (up to a few microns). The implantation defects resulting from their stopping are therefore...
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Local order control tool
Nanostructure synthesis
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