Microanalysis based on electron irradiation
Microanalysis of surfaces and thin films

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P3795 V2 Article

Microanalysis based on electron irradiation
Microanalysis of surfaces and thin films

Author : Guy BLAISE

Review date: January 5, 2014 | Lire en français

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2. Microanalysis based on electron irradiation

A description of the physical principles involved and analysis methods can be found in the following articles:

  • Electron energy loss spectrometry in solids ,

  • Nuclear microprobe [P 2 563],

  • Auger electron spectroscopy

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