Microanalysis of surfaces and thin films : Microanalysis based on ion irradiation

Microanalysis based on ion irradiation
Microanalysis of surfaces and thin films

Author : Guy BLAISE

Review date: January 5, 2014 | Lire en français

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3. Microanalysis based on ion irradiation

A description of the physical principles involved and the methods of analysis can be found in the articles of this treatise:

Analysis by direct observation of nuclear reactions. Backscattering of charged particles and nuclear microprobe [P 2 563] ;
Charged particle induced X-ray analysis;
Secondary Ion Emission Analysis SIMS.

The ions used in microanalysis fall into two categories:...

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Microanalysis based on ion irradiation

(1) - HEINRICH KURT (J.F.) - Electron Beam X-Ray Microanalysis. - Ed. Van Nostrand Reinhold Company (1981).
(2) - POWEL (C.J.) - SEM IV/1649-64 (1984).
(3) - CAZAUX (J.) - Applications of Surface Science. - 20, p. 457-71 (1985).
...

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