Three-dimensional imaging and acquisition
Secondary ion mass spectrometry: SIMS and ToF-SIMS Analytical procedures and performances

One of the most spectacular developments in microprobe mode ion analysis is the ability to continuously acquire all the information relating to the analysis performed:

• with sequential detection (magnetic deflector spectrometer), the values of the ionic intensities of the selected elements as a function of time, i.e. the depth of erosion and the position of the probe on the surface;

• in time-of-flight detection, complete mass spectra, also coupled with eroded depth and probe position on the surface.

Computerized storage of these data enables us to reconstruct the three-dimensional distribution of signal variations for selected elements, or...