Principles of microsystems used in electrical metrology
Application of the MEMs to electric metrology

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Principles of microsystems used in electrical metrology
Application of the MEMs to electric metrology

Authors : Antti MANNINEN, Anna-Maija KÄRKKÄINEN, Nadine PESONEN, Aarne OJA, Heikki SEPPÄ

Publication date: June 10, 2007 | Lire en français

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2. Principles of microsystems used in electrical metrology

2.1 Microsystems components

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2.1.1 Manufacturing technologies

Silicon micromachining is traditionally divided into two categories: surface micromachining and bulk micromachining . The silicon-on-insulator (SOI) process lies between the...

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