2. Statistical analysis of local deformation of contact surfaces
After deposition of the thin films, the contact surfaces are rough. They are composed of a multitude of asperities (figure 6) with different radii of curvature r and heights z. One of the first quantified studies of the evolution of contact surface morphology in ohmic MEMS microrelays was carried out by Gregori and Clarke . In this case, the mechanical...
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Statistical analysis of local deformation of contact surfaces
Discrete study of the deformation of asperities on nanorough surfaces
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