General
Micro-machining of single-crystal materials

Many very small mechanical devices can be made by combining the three-dimensional basic elements mentioned in the introduction: valves, springs, mirrors, injectors, connectors, printer heads, force and pressure sensors, accelerometers and even micromotors. This is the concept of micromechanics.

Micromechanical components manufactured in this way can be combined or interfaced advantageously, if they are made of silicon, with microelectronic circuits. This brings us to the concept of microsystems, which some believe heralds a revolution comparable to that of microprocessors. The three fundamental functions of information detection, processing and action on the external environment can be found on the same chip or on an assembly of chips....