3. Other materials
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3.1.1 Structure and benefits of the material Positioning in relation to silicon
Single-crystal quartz (not to be confused with amorphous fused silica, often misleadingly referred to as quartz) belongs to a crystalline class characterized by one axis of symmetry of order 3, and 3 axes of symmetry of order 2, perpendicular to the first and forming 120° angles between them. It has neither a plane of symmetry nor a center of symmetry. The reference axes (X, Y, Z ) are often chosen so that X is one of the axes...
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Other materials
References
Silicon
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(1) - PETERSEN (K.E.) -
Silicon as a mechanical material.
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Proceedings of the IEEE, vol. 70, n 5, mai, p. 420-457, 1982.
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(2) - ANGELL (J.B.), TERRY (S.C.), BARTH (P.W.) -
Des dispositifs micromécaniques en silicium.
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Pour la Science,...
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