Definitions
Microsystems - Sensors, actuators and applications

Microsystems are intelligent, miniaturized, multifunctional, multiphysical devices whose basic microstructures, serving as sensors or actuators, generally measure no more than a few millimeters and can be as small as a few micrometers. They combine these basic elements (mechanical, optical, electromagnetic, thermal, fluidic structures, etc.) with embedded electronic circuits. They thus perform two main categories of functions:

• the sensor function, which detects local information such as thermal, biological, chemical, or optical data;

• the actuator function, which can respond to information received in the form of movement, filtering, etc.

In their current form, microsystems consist of mechanical structures,...