Instrumentation
Ellipsometry - Instrumentation and applications

We describe here the case of a rotating polarizer ellipsometer (model SOPRA GESP5) to explain the practical realization of a measuring device (figure 1).

The instrument comprises a source arm and a detector arm that can be rotated on a goniometer about an axis passing through the sample surface.

The angle of incidence is defined by the optical axis of the source arm and the normal to the sample surface [34].

• Source

  The source used is a high-pressure xenon short-arc lamp with very low residual polarization. It emits across the entire visible, near-ultraviolet and near-infrared spectrum (typically 180 to 2,500 nm).

  The beam from the arc, of reduced dimensions (1.3 × 0.4 mm), is collimated by...