Scaling effects in electromechanical converters
Variable-capacity electrostatic micromotors

When it comes to designing and dimensioning a micrometer-sized electric actuator, the first question to ask is what type of forces should be used. While the use of magnetic forces is obvious in conventional dimensions, the question remains when approaching the micrometer range. Most of the electromechanical conversion mechanisms that can be used for microsystems are known and studied in the more conventional dimensional ranges. They are based on the use of :

• of the electric field for electrostatic and piezoelectric systems... ;

• magnetic field for electromagnetic and magnetostrictive systems... ;

• thermal effects for phase-change systems, shape-memory...