5. Thanks

All the results presented in this article were obtained in collaboration with CEA/LETI for the silicon modulator part and the L-Ness laboratory (Come, Italy) for the Ge/SiGe multi-well part. The authors would like to thank all the cleanroom staff at CEA/LETI, L-Ness and CTU-IEF-Minerve, and in particular Jean-René Coudevylle, Xavier Le Roux and Samson Edmond for their help in developing the technological stages. Thanks are also due to Paul Crozat of IEF for his expertise in all microwave aspects, and to Eric Cassan and Suzanne Laval for their fruitful discussions. Finally, this work has received funding from the European Commission (HELIOS project), and the French National Research Agency (ANR) (SILVER and GOSPEL projects).