6. Glossary

Thermogravimetry; thermogravimétrie

A technique for measuring, as a function of time or temperature, the mass of a sample heated or cooled according to a specific temperature program.

ICP-MS (inductively coupled plasma-mass spectrometer )

A mass spectrometer used to determine the nature of a material, which analyzes the ions formed when elements in a sample pass through an inductively coupled plasma.

MOEMS

Micro-opto-electromechanical systems

CMOS (Complementary Metal Oxide Semiconductor )

CVD (Chemical Vapor Deposition)

Chemical Vapor Deposition

PVD (Physical Vapor Deposition)

Physical vapor deposition

PLD (Pulsed Laser...