5. Moldmaking technologies

One of the special features of microPIM relates to molds. PIM uses traditional manufacturing technologies, such as machining, but these are no longer sufficient to produce molds with micro-details. In this case, both microsystem manufacturing processes and micromachining technologies are used (figure 11 ). Mould manufacturing processes can be divided into three technology categories:

• Microelectronics processes: lithography, electroforming, LIGA, CVD, PVD and NanoImprint Lithography (NIL);

• energy-assisted processes: laser ablation, microEDM and ion machining;

• mechanical processes: micro-drilling and micro-milling.