5. Conclusions and outlook

GDMS is currently the most sensitive and reproducible technique for the direct analysis of traces and ultra-traces in solid samples, whether conductive or insulating. In the latter case, RF GDMS offers even greater potential, as these samples are the most difficult to bring into solution.

As a mass spectrometry technique, GDMS is applied to the determination of isotopic abundances of elements in numerous solid matrices, with very good reproducibility and accuracy.

• For surface analysis, GDMS has the advantage of being suitable for routine use in industrial applications. Depth resolution is certainly not on a par with the performance of pure surface analysis techniques such as SIMS or XPS, for example. Nevertheless, qualitative and quantitative characterization of the thickness and composition of thin films is effective....