5. LNE's metrological AFM

Since 2007, LNE (Laboratoire National de Métrologie et d'Essais), France's national metrology institute, has been developing its own metrological AFM. This reference instrument will eventually make it possible to offer calibration solutions in France for reference structures used mainly in near-field microscopy, but also in electron microscopy. LNE has chosen to develop this mAFM in its entirety, so as to retain control over the design choices that determine measurement uncertainty.