Development of ChemFET chemical field-effect transistors
Development of chemical field-effect transistors for enzymatic detection

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IN212 V1 Research and innovation

Development of ChemFET chemical field-effect transistors


Development of chemical field-effect transistors for enzymatic detection

Author : Pierre TEMPLE-BOYER

Publication date: June 10, 2014, Review date: January 12, 2025 | Lire en français

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1. Development of ChemFET chemical field-effect transistors

At the initiative of P. Bergveld in the 1970s, the MOSFET transistor was adapted to liquid-phase detection, leading to the concept of the ChemFET (chemical field effect transistor) or ISFET (ion-sensitive field effect transistor) .

To achieve this, the metal gate electrode (G ) is replaced by an ion-sensitive insulator, and the gate is electrically biased through an electrolyte via a reference electrode (figure

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